1. The operation is straightforward and rapid. The sputtering current and time can be preset in advance.
2. A constant-current and cold-state precise sputtering process is achieved via a highly efficient low-voltage DC magnetron head, thereby preventing thermal damage to the sample surface.
3. The sputtering operation can be initiated with a single button click.
4. It is equipped with microprocessor control and safety interlocks.
5. Sputtering head: Low-voltage planar magnetron. The target material can be replaced rapidly, and it is equipped with a surrounding dark-zone shield.
6. The vacuum pump can be installed on an anti-vibration platform. It features a fully metallic integrated coupling system.
7. Vacuum pump: Two-stage direct-connected rotary vane vacuum pump

1. Personal protection: Protective glasses, gloves, lab coats, etc. should be worn during operation to prevent harm to the skin and eyes.
2. High voltage safety: The ion sputtering instrument generates high voltage during operation. Do not touch the high-voltage parts during operation to avoid electric shock. Also, do not place flammable or explosive items around the equipment to prevent fire accidents.
3. Check equipment status: Before use, carefully inspect whether all components of the equipment are normal, including the vacuum pump, sputtering gun, control system, etc., to ensure the equipment is in good working condition.
4. Check power supply and gas lines: Ensure the power cord is connected correctly and undamaged, with good grounding. Also, check that the gas lines are properly connected and the gas pressure meets the requirements.
5. Sample preparation: Clean the sample surface to remove oil and impurities to prevent contamination during sputtering. Place the sample on the sample stage and secure it firmly to prevent movement during sputtering.
6. Vacuum system operation: Before evacuating, ensure all valves are closed. During the evacuation process, closely monitor the vacuum level to ensure it meets the experimental requirements. Avoid keeping the mechanical vacuum pump in the ultimate vacuum state for a long time to prevent oil backflow.
7. Target material replacement: When replacing the target material, ensure the equipment is turned off and in a safe state. Use dedicated tools for replacement and avoid direct contact with the target material to prevent scratches or contamination.
8. Equipment cleaning: After the experiment, promptly clean the vacuum chamber, sputtering head, and other components to keep the equipment clean. Regularly wipe the inside of the vacuum chamber with a cloth slightly dampened with acetone, being careful not to break the glass vacuum seal.
9. Regular maintenance: Regularly perform maintenance checks on the equipment, including cleaning, lubrication, and replacement of worn parts. The vacuum pump oil should be changed regularly, and consumable parts such as the oil mist filter should also be replaced periodically.