1. Stainless steel vacuum chamber, military-grade welding technology, strong chamber sealing, excellent corrosion resistance.
2. Equipped with dual-layer electrode and multi-level treatment plates, effectively improving space utilization.
3. Touchscreen operation interface, user-friendly control, real-time display of process parameters.
4. Can store multiple process recipe data, which can be retrieved for use, and data is traceable.
5. Equipped with two independent gas channels, facilitating exploration of the impact of different gas ratios on cleaning effects.
6. Convection gas distribution system, which can form dynamic circulation and uniform gas intake during cleaning to enhance cleaning effectiveness.
7. Main applications: Cleaning; activation; etching; bonding; photoresist stripping.
8. RPS-A-03 and RPS-A-04 have overvoltage, overcurrent, over-temperature, and reflected power protection.

1. Power supply and power: Power supply requirements: 220V, 50/60Hz, grid fluctuation tolerance: ±10%, compliant with grid earthing standards, and must be installed in areas free from strong electromagnetic interference.
2. Installation environment requirements: The ambient temperature should be between 0-40℃, and the humidity should be
1. Sample placement: Ensure the materials are placed firmly and in appropriate quantities at a time.
2. Operation monitoring: Pay attention to the equipment's operating status. Stop the machine immediately for inspection if any abnormality occurs.
3. Installation environment: The equipment should be placed in a dry, well-ventilated area free from strong magnetic fields and kept away from flammable and explosive materials.
4. Equipment cleaning: Clean the equipment promptly after operation.
5. Waste disposal: Harmful exhaust gases should be connected to a pipeline leading to a treatment pool.